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Variations of sensor diaphragm roughness with the feed rate and amplitude of ultrasonic vibration, in the case that the spindle rotation speed is 45,000 rpm.
| No. | Wheel Mesh Size | Spindle Speed (rpm) | Axial Feed Rate (μm/s) | Vibration Amplitude (μm) | Roughness Ra (nm) |
|---|---|---|---|---|---|
| 4 | 600# | 45,000 | 0.16 | 0 | 31 |
| 5 | 600# | 45,000 | 0.32 | 0 | 76 |
| 6 | 600# | 45,000 | 0.64 | 0 | 192 |
| 7 | 600# | 45,000 | 0.16 | 0.5 | 19 |
| 8 | 600# | 45,000 | 0.32 | 0.5 | 25 |
| 9 | 600# | 45,000 | 0.64 | 0.5 | 31 |
