| Region Name | Lens Mode | Pass Energy (eV) | Excitation Energy (eV) | Energy Mode | Energy (eV) | Energy Step (meV) | Step Time (sec) | Steps | |
| Low | High | ||||||||
| Survey Scan | Transmission | 200 | 1486.6 | Binding | 0 | 1300 | 800 | 0.286 | 1657 |
| Sr 3d | Transmission | 100 | 1486.6 | Binding | 127.805 | 140.1942 | 50 | 0.157 | 499 |
| Ti 2p | Transmission | 100 | 1486.6 | Binding | 449 | 471 | 50 | 0.157 | 691 |
| O 1s | Transmission | 100 | 1486.6 | Binding | 515 | 545 | 50 | 0.157 | 851 |
| C 1s | Transmission | 100 | 1486.6 | Binding | 277.5 | 302.5 | 50 | 0.157 | 751 |
| Ge 3d | Transmission | 100 | 1486.6 | Binding | 24 | 36 | 50 | 0.157 | 491 |