Table 1.

Summary of roughness of hybrid thin films

Dielectric materials	No modified layer		PMMA-modified		COC-modified
	Ra roughness (nm)	Thickness (nm)	Ra roughness (nm)	Thickness (nm)	Ra roughness (nm)	Thickness (nm)
IB0	0.319	352	0.262	375	0.233	381
IB2	1.836	358	1.301	377	1.159	380
IB5	3.761	363	2.484	387	1.535	379
IB8	5.390	354	3.187	370	2.189	374
IB10	8.324	365	3.597	389	2.489	383
IB12	9.007	356	4.340	373	3.229	380