Table 3.
Beam Type | Fit Orientation | FWHM at surface (μm) | FWHM/Depth (μm/ μm) |
---|---|---|---|
| |||
Airy | Lateral | 1.18 ± 0.04 | (1.7 ± 0.2) × 10−3 |
Axial | 1.44 ± 0.06 | (2.6 ± 0.3) × 10−3 | |
| |||
Gaussian | Lateral | 1.1 ± 0.1 | (1.9 ± 0.6) × 10−3 |
Axial | 1.16 ± 0.09 | (2.2 ± 0.6) × 10−3 |