TABLE II.

Experimental results of point-to-point control

		x (μm)	y (μm)	θ (°)
Exp. (1)	D	−100.00	100.00	0.00
	M	−99.91 ± 0.23	99.97 ± 0.29	0.01 ± 0.01
	I	−100.22 ± 0.42	100.16 ± 0.48	0.01 ± 0.01
Exp. (2)	D	100.00	100.00	10.00
	M	100.21 ± 0.43	100.37 ± 0.39	10.01 ± 0.02
	I	101.09 ± 0.82	100.97 ± 0.80	9.98 ± 0.07
Exp. (3)	D	100.00	100.00	−10.00
	M	99.88 ± 0.53	100.33 ± 0.43	−10.01 ± 0.01
	I	100.92 ± 0.79	100.38 ± 0.77	−10.04 ± 0.05

D: Desired, M: Measured, I: Image analysis