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. Author manuscript; available in PMC: 2016 Nov 21.
Published in final edited form as: J Appl Phys. 2016 Sep 1;120(9):095702. doi: 10.1063/1.4962016

Fig. 2.

Fig. 2

(a) EBIC collection efficiency map for the cleaved sample at beam energy of 15 keV. The n-contact is at the left-hand side. (b) The same data for the FIB-prepared sample. (c) EBIC collection efficiency versus beam position for FIB’d Si samples, for beam energies of (5,10,15, 20) keV, (d) the corresponding maximum collection efficiency versus beam energy.