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. Author manuscript; available in PMC: 2016 Nov 21.
Published in final edited form as: Opt Express. 2016 Jul 25;24(15):17459–17469. doi: 10.1364/OE.24.017459

Fig. 4.

Fig. 4

Comparison between the measured displacement from the Michelson interferometer and the displacement measured with the capacitive sensor integrated in the nanopositioner. (a) Measured displacement from the CW interferometer and capacitive sensor, (b) difference between the CW interferometer and capacitive sensor, (c) difference between the pulsed laser interferometer without filter and capacitive sensor, and (d) difference between the pulsed laser interferometer with Filter A and capacitive sensor. A three-term Fourier series was fit to each difference signal to show the consistency of the difference signal across all measurements.