Table 1.
Power supply | Wavenumber (cm−1) | Peak assignment |
---|---|---|
| ||
DC | 1252, 1256 | C-H (in Si-C-H) [49] |
1120, 1124 | Si-O (in Si-O-Si) [49–53] | |
1228 | C-O-N=O [54] | |
840 | Si-C [49] | |
799 | Si-O (in Si-O-Si) [49] | |
| ||
RF | 2957 | CH3 [55] |
1256 | C-H (in Si-C-H) [49] | |
1215 | C=N [56] | |
1120 | Si-O (in Si-O-Si) [50–53] | |
1032 | CH2 [57] | |
844 | Si-C [49] | |
800 | Si-O (in Si-O-Si) [49] |