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| Erbium | Oxygen | ||
|---|---|---|---|
| Energy (MeV) | Dose (1013 cm−2) | Energy (keV) | Dose (1013 cm−2) |
| 1.50 | 16.0 | 15 | 4.0 |
| 1.00 | 10.0 | 45 | 9.0 |
| 0.65 | 7.5 | 100 | 15.0 |
| 0.40 | 5.0 | 200 | 27.0 |
| 0.25 | 3.3 | ||
Erbium and oxygen implanted doses and energies for the 1 × 1019 ion cm−3 volume concentration.
