Table 3.
Grade | Maximum number of particles permitted/m3 | |||
---|---|---|---|---|
At rest | In operation | |||
≥0.5 µm | ≥5.0 µm | ≥0.5 µm | ≥5.0 µm | |
Aa | 3,520 | 20 | 3,520 | 20 |
B | 3,520 | 29 | 352,000 | 2,900 |
C | 352,000 | 2,900 | 3,520,000 | 29,000 |
D | 3,520,000 | 29,000 | Not defined | Not defined |
aAll areas must be free particles of size greater than 5 μm. Limits are set to 1 particle/m3 because it is impossible to ensure the absence of particles with any statistical significance. The periodic classification of facilities (cleanroom) must show that all areas meet the defined limits.