Table 3.

Axis travel ranges

Axis #	Axis name	Travel range	Comment
#1	Base coarse positioning 1	+/− 25 mm	perpendicular to table front side
#2	Base coarse positioning 2	+/− 25 mm	parallel to table front side
#3	Substrate vertical rotation	endless	large offset from substrate position
#4	Substrate off-center positioning	+/− 10 mm	side-ways along knife edge direction
#5	Substrate vertical positioning	+/− 10 mm	Substrate lowering and lift off movement
#6	Substrate angular rotation	+/− 20°	angle between water surface and substrate
#7	Substrate longitudinal positioning	+/− 25 mm	in substrate plane towards/away from knife edge