Figure 1.

(a) Schematic diagrams of the fabrication procedure for the flexible pressure sensor: (1) SU-8 mold; (2) Polydimethylsiloxane (PDMS) casting; (3) PDMS mold; (4) Pre-strain PDMS; (5) Pre-strain relax after O₂ plasma treatment; (6) Sodium dodecyl sulfate (SDS) surface functionalization; (7) Ag wrinkled electrodes on the PDMS substrate after Ag sputtering; (8) Carbon nanotubes (CNTs)/PDMS elastomer dielectric layer; (9) Ag wrinkled electrodes on the PDMS substrate; (10) Flexible pressure sensor; (b) Laser confocal image of the electrode pattern; (c) Cross-section of the fabricated electrode from an SEM image; (d) digital image of a typical flexible pressure sensor with 3 × 3 detecting units.