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. 2016 Dec 14;16(12):2131. doi: 10.3390/s16122131

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© 2016 by the authors; licensee MDPI, Basel, Switzerland.

This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).

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Characterization of the capacitive pressure response of the pressure sensor. (a) Sensitivity with different sensing area (size = 4 × 4 mm², 6 × 6 mm², and 8 × 8 mm², respectively); (b) Capacitance–time curve for the detection of pressure (100 Pa) according to the loading and unloading of a little stone (0.7 g); (c) Bending stability of pressure response after 500-cycle bending test; (d) Multi-cycle tests of dynamic loading/unloading pressure with different values; (e) Fast response and relaxation time (<200 ms) of the sensor; (f) The curve of thermal drift of the sensor.

Characterization of the capacitive pressure response of the pressure sensor. (a) Sensitivity with different sensing area (size = 4 × 4 mm², 6 × 6 mm², and 8 × 8 mm², respectively); (b) Capacitance–time curve for the detection of pressure (100 Pa) according to the loading and unloading of a little stone (0.7 g); (c) Bending stability of pressure response after 500-cycle bending test; (d) Multi-cycle tests of dynamic loading/unloading pressure with different values; (e) Fast response and relaxation time (<200 ms) of the sensor; (f) The curve of thermal drift of the sensor.