Table 1.

Sensitivity of the proposed sensor given different stiffness coefficient values of the torque spring.

Stiffness Coefficient	Horizontal Force			Vertical Force
	νx, max	νy, max	νz, max	νx, max	νy, max	νz, max
0.3 (Nm/deg)	0.426	0.427	0.274	1.559	1.614	0.136
0.7 (Nm/deg)	0.181	0.182	0.120	1.809	2.132	0.058
1.5 (Nm/deg)	0.080	0.084	0.057	2.501	3.720	0.027