Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Thickness and sputter yield volume under bombardment with 20 keV Ar3k+ cluster ions determined for the individual layers of the irganox multilayer sample as described in the text.
| Film Thickness (nm) |
Sputter yield (nm3)
|
||
|---|---|---|---|
| 20 keV Ar3k+ | 40 keV C60+ | ||
| Layer 1 (1098) | 105 | 78 | 198 |
|
|
|||
| Layer 2 (1098/1010) | 105 | 88 | 202 |
|
|
|||
| Layer 3 (1098) | 106 | 77 | 186 |
|
|
|||
| Layer 4 (1010) | 104 | 113 | 242 |
|
|
|||
