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Simulated depth profiles for a) 1 keV Ne+ irradiation of sample #2, b) 1 keV Ar+ irradiation of sample #2, c) 1 keV Ne+ irradiation of sample #4, and d) 1 keV Ne+ irradiation of sample #6. Sample #2 has an inter-layer spacing of 10 nm and 20 nm, and samples #4 and #6 have an inter-layer spacing of 20 nm and 40 nm.
