Table 2. Capacitive-coupling ratios of planar and SiNW DG FETs measured at room temperature and 120°C.

	Capacitive-coupling ratio at 25°C	Capacitive-coupling ratio at 120°C	Δ Capacitive-coupling ratio	Error percentage (%)
Planar DG FET	9.1	11.1	2.0	22.2
SiNW DG FET	18.0	18.4	0.5	2.6