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. 2014 Aug 9;1(1):22. doi: 10.1186/s40580-014-0022-6

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© Wang et al.; licensee Springer 2014

This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/4.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly credited.

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Experimental settings and characterization of 2D MoS ₂ films directly grown by sputtering. (a) schematic of the pulsed dc magnetron sputtering configuration (b) cross-sectional TEM (dashed lines are added for highlighting the MoS₂ layers, (c) x-ray photoelectron spectroscopy data revealing the structure (d) 1 cm × 1 cm MoS₂ specimen packaged for van der Pauw measurements showing the large active area.