Table 11.
Product | G | Reference |
---|---|---|
|
|
|
C7F16 (disappearance) | 3.0 | 9 |
F | 0 | 9 |
SiF4 | 0.17 | 10 |
CF4 | .19 | 10 |
CF4 | 0 | 9 |
C2F6 | 0.08 | 10 |
<C7 | ~1 | 9 |
>C7 | ~2 | 9 |
~C13–C15 | 1 | 9 |
C13–C15 | 2 | 10 |
Product | G | Reference |
---|---|---|
|
|
|
C7F16 (disappearance) | 3.0 | 9 |
F | 0 | 9 |
SiF4 | 0.17 | 10 |
CF4 | .19 | 10 |
CF4 | 0 | 9 |
C2F6 | 0.08 | 10 |
<C7 | ~1 | 9 |
>C7 | ~2 | 9 |
~C13–C15 | 1 | 9 |
C13–C15 | 2 | 10 |