U11	U22	U33	U12	U13	U23
C1	0.0526 (10)	0.0988 (16)	0.0819 (13)	0.0139 (10)	0.0035 (9)	−0.0235 (12)
C2	0.0581 (11)	0.1083 (18)	0.0830 (13)	−0.0068 (11)	0.0248 (10)	−0.0037 (13)
C3	0.0548 (9)	0.0710 (11)	0.0728 (11)	−0.0055 (8)	0.0142 (8)	0.0061 (9)
C4	0.0429 (7)	0.0532 (8)	0.0478 (7)	−0.0038 (6)	−0.0002 (6)	−0.0007 (6)
C5	0.0577 (9)	0.0563 (10)	0.0677 (10)	0.0023 (7)	0.0049 (7)	0.0015 (8)
C6	0.0682 (11)	0.0665 (12)	0.0885 (14)	0.0138 (9)	−0.0011 (10)	−0.0103 (10)
C7	0.0453 (7)	0.0420 (7)	0.0418 (6)	−0.0102 (5)	−0.0029 (5)	0.0014 (5)
C8	0.0597 (8)	0.0347 (7)	0.0508 (7)	−0.0064 (6)	0.0081 (6)	−0.0023 (6)
C9	0.0447 (6)	0.0333 (6)	0.0366 (6)	0.0004 (5)	0.0123 (5)	−0.0009 (5)
C10	0.0498 (8)	0.0469 (8)	0.0543 (8)	−0.0080 (6)	0.0102 (6)	0.0061 (6)
C11	0.0604 (9)	0.0395 (7)	0.0521 (8)	−0.0086 (6)	0.0088 (7)	0.0089 (6)
C12	0.0551 (7)	0.0340 (6)	0.0361 (6)	0.0012 (5)	0.0082 (5)	−0.0014 (5)
F1	0.0774 (9)	0.1484 (14)	0.1323 (13)	0.0357 (9)	0.0230 (8)	−0.0415 (11)
N1	0.0499 (6)	0.0442 (6)	0.0508 (6)	−0.0030 (5)	0.0106 (5)	0.0070 (5)
N2	0.0442 (6)	0.0422 (6)	0.0499 (6)	−0.0029 (5)	0.0079 (5)	0.0056 (5)
N3	0.0467 (6)	0.0320 (5)	0.0390 (5)	−0.0001 (4)	0.0081 (4)	0.0003 (4)
N4	0.0677 (8)	0.0397 (6)	0.0557 (7)	−0.0015 (6)	−0.0045 (6)	0.0089 (5)
N5	0.0586 (9)	0.0747 (11)	0.1098 (14)	−0.0267 (8)	−0.0091 (8)	0.0363 (10)
O1	0.0564 (6)	0.0514 (6)	0.0719 (7)	−0.0071 (5)	0.0085 (5)	0.0188 (5)
S1	0.0472 (2)	0.0404 (2)	0.0655 (2)	−0.00120 (14)	0.00437 (16)	0.01690 (16)