Table 3. Experimental stages, specifications and locations.

Platform/stage	Motion axis† (range)	Repeatability (resolution)	Max. load	No. of stages	Location
Small (SS)	X (800 mm)	±5 (1) µm	6 kg	5	Large table
Medium (MS)	Y (±50 mm)
Robot (RS)	Speed = 5 mm s−1
Large (LS)	X, Z (±50 mm)	±5 (5) µm	100 kg	2	Goniometer table
	Y (±25 mm)	±2.5 (2.5) µm
	Arcs (×2) (±15°)	±1 (1) × 10−6°
	φ rotation (−5 to 180°)	±1 (1) × 10−6°
Type-R	Robotic	–	3 kg	1	See Fig. 3 ▸(a)
Type-T	Static	–	500 kg	1	See Fig. 3 ▸(a)

^† X = lateral movement (across the beam), Y = vertical, Z = along the beam.