Fig. 2.
N 1 s photoelectron spectra of AlN/Si structures: a as-deposited, b annealed at 600 °C, c annealed at 700 °C, d annealed at 800 °C, and e annealed at 900 °C for 60 s in N2 ambient
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.