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. 2017 Feb 17;11(1):014113. doi: 10.1063/1.4976690

FIG. 4.

FIG. 4.

Comparison of SU8 structures obtained using a conventional mercury lamp and a LED. The SEM micrographs show channels (100 μm and 20 μm wide of 20 μm height) fabricated using each light source. The scale bar is 100 μm.