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. 2017 Mar 2;7:43621. doi: 10.1038/srep43621

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Copyright © 2017, The Author(s)

This work is licensed under a Creative Commons Attribution 4.0 International License. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in the credit line; if the material is not included under the Creative Commons license, users will need to obtain permission from the license holder to reproduce the material. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/

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(a) Upper part of a 25 × 25 CL pointer array as recorded using the optical microscope. The magnified view shows the displacement vector δ between FM and transformed EM coordinates drawn to scale. (b) By averaging displacement vectors as shown in (a) over multiple acquisitions, a distortion field between FM and EM coordinates is calculated. (c) The estimated overlay accuracy versus the number of CL pointers shows a predicted N^−1/2 behavior. For this experiment, the accuracy is <5 nm for ≥9 CL pointers. (d) Distribution of overlay errors using different sets of 9 CL pointers. Scale bars are (a-top and b) 10 μm, (a-bottom) 200 nm and (d) 5 nm. The scale for the length of the distortion vectors in (b) is indicated by the arrow at the bottom indicating 200 nm distortion.