Figure 7.

(a) real-time monitoring of a lateral intensity distribution of LED through microlenses produced using photosensitized and pure SZ2080 during irradiation with 515 nm 300 fs pulses at 200 kHz with $I_p$ = 1.91 GW/cm${}^2$ (spot radius of 100 $\mathsf{\mu }$m). Faster deterioration of SZ2080 containing 1 wt % IRG as compared with pure SZ2080 is evident, as the image at the focus starts to degrade after 60 and 20 s (marked by red dashed squares), respectively; (b,c) SEM micrographs of the tested lenses before and after exposure. The photosensitized element is entirely destroyed, while the one produced out of pure SZ2080 exhibits relatively low damage; and (d) start of the microlens degradation for different concentrations of PI in SZ2080, as well as time needed to damage SU8. All scale bars are 10 $\mathsf{\mu }$m.