Figure 1.

Schematic of the designed resonant pressure sensor without electrode wire layer. The blue, yellow, and pink layers represents the glass vacuum cap layer, the resonance structure layer, and the pressure sensitive layer, respectively. (a) Sectional view of the main surface of the resonant pressure sensor; (b) Sectional view of the resonant pressure sensor; (c) The resonance structure layer with each diaphragm attached to one end of the resonator by a silicon island; (d) The stable resonator for frequency output.