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An experimental bonding process was conducted to verify the correctness and feasibility of the cross-layer anodic bonding. (a) The Schematic of the test process; (b) The bonding result of the cross-layer anodic bonding; (c) The anodic bonding electrical characters of the GSS cross-layer anodic bonding; (d) The anodic bonding electrical characters of the GS anodic bonding.
