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. 2017 Mar 22;50(Pt 2):539–546. doi: 10.1107/S1600576717003259

Figure 3.

Figure 3

ω–2θ scans for Si(004) (coherent part of scattering): (1) as-implanted sample, (2) sample annealed at 853 K and (3) sample annealed at 1073 K.