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(a), (b), (c) TEM and (d), (e), (f) inverted tomography TEM images: (a), (d) as-implanted, (b), (e) 853 K and (c), (f) 1073 K. The oxide layer is not shown in the tomography images. Large-size helium-filled bubbles are located in the amorphous Si layer. ‘Small’ bubbles are located inside the distorted crystalline Si layer.
