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(a) Schematic of the simulation model marked by four lateral positions (t0 to t3) to present the feature sections: Al, dielectric, Al grating and air. (b) Scanning electron microscopy (SEM) image of the fabricated sample. The Al grating has a period p = 6 μm and width d = 3 μm. The thickness of four lateral sections are t0 = 0.2 μm, t1 − t0 ranging from 0.05 to 8 μm, t2 − t1 = 0.1 μm and t3 − t2 = 2 μm.
