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a) Mechanism of parylene CVD. (1) [2,2]paracyclophane (2) p-xylylene diradical intermediate (3) poly[p-xylene]; A) Sublimation, B) pyrolysis, C) substrate adsorption. b) Mechanism of iCVD: 1) decomposition of initiator by hot filament, 2) initiator attack of adsorbed monomer, 3) propagation to form polymer film.
