Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
(a) The SiLN fabrication process, showing e-beam lithography and etching of photonic structures into an SOI die, bonding to LN, removing the backside silicon, and patterning electrodes. (b) An optical microscope image showing fabricated ring, disk and photonic crystal structures. (c) A scanning electron micrograph image of a SiLN photonic crystal with electrodes.
