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. 2017 Apr 13;7:46313. doi: 10.1038/srep46313

Table 2. Photonic crystal cavity nominal dimensions.

Parameter Value
Waveguide width 1800 nm
Silicon thickness 145 nm
Hole width (mirror region) 1040 nm
Hole height 140 nm
Lattice spacing 320 nm
Number of holes in defect region 91
Number of holes in each mirror region 20
Scaling of lateral dimensions for measured device +4%