Table 2. Changes in resonant properties by sequential mass loading (f ₀ : resonance frequency, Δf: full width at half maximum, V _P-P : actuation voltage).

Deposition	None	1st	2nd	3rd	4th	5th
Mass (g)		5.31 × 10−13	1.06 × 10−12	1.59 × 10−12	2.13 × 10−12	2.66 × 10−12
f0 (MHz)	5.35	5.04	4.74	4.49	4.33	4.13
Δf (Hz)	300	310	370	340	350	360
VP-P (V)	0.55	0.6	0.65	0.75	0.7	1.8*
Q-factor	17847	16793	12805	13201	12382	11467

*Sudden increase in actuation voltage.