Table 1.
Some common piezoelectric materials for SAW chemical sensors. An (*) is for a SAW other than Rayleigh mode and a (†) is for a measured velocity.
| Substrate Material | Reported SAW Velocity (m/s) | K2 (%) | TCF (ppm/C) | ε | Tmax (C) |
|---|---|---|---|---|---|
| ST-X Quartz | 3159.3 [30] | 0.11 | 0 | 3.7 | 573 |
| Y-Z LiNbO3 | 3487.7 [30] | 4.80 | 94 | 1150 | |
| 128Y-X LiNbO3 | 3992 [43] | 5.6 | 75 | 83 | |
| 64Y-X LiNbO3 | 4742.5 * [54] | 11.3 | 80 | ||
| Y-Z LiTaO3 | 3230 * [42] | 0.74 | 35 | 665 | |
| X-112Y LiTaO3 | 3301 * [45] | 0.64 | 18 | 52 | |
| (0, 138.5, 26.8) La3Ga5SiO14 | 2734 † [44] | 0.34 | ~0 | 18 | 1470 |
| (0001) AlN | 5607 [55] | 0.30 | 19 | 8.5 | 2200 |
| (001)-<110> GaAs | 2864 [52] | 0.07 | 35 | 12.9 | |
| ZnO | 2645 [47] | 1.8 | 15 | 10 | 1170 |