Table 3.
Comparison of simulation result and nano-indentation results (unit: MPa).
Material of Substrate | FEA Results | Analytical Results | Nano-Indentation Results |
---|---|---|---|
silicon carbide | 43.4 | 43.3 | 47.0 |
aluminum oxide | 115.9 | 116.4 | 121.2 |
zirconium oxide | 153.9 | 155.1 | 158.8 |