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. 2017 Apr 14;17(4):857. doi: 10.3390/s17040857

Table 3.

Comparison of simulation result and nano-indentation results (unit: MPa).

Material of Substrate FEA Results Analytical Results Nano-Indentation Results
silicon carbide 43.4 43.3 47.0
aluminum oxide 115.9 116.4 121.2
zirconium oxide 153.9 155.1 158.8