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Experimental scheme and results of three factors and three levels.
| Experiment | Substrate Thickness/μm | W-3Re Films Thickness/μm | Temperature/°C | W-3Re Films Stress/MPa |
|---|---|---|---|---|
| 1 | 1 | 1 | 1 | 259.2 |
| 2 | 1 | 2 | 2 | 290.8 |
| 3 | 1 | 3 | 3 | 320.1 |
| 4 | 2 | 1 | 2 | 312.4 |
| 5 | 2 | 2 | 3 | 354.1 |
| 6 | 2 | 3 | 1 | 263.4 |
| 7 | 3 | 1 | 3 | 358.1 |
| 8 | 3 | 2 | 1 | 267.7 |
| 9 | 3 | 3 | 2 | 311.1 |
