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Rang analysis of thermal stress in W-3Re films (unit: MPa).
| Factors | Substrate Thickness | W-3Re Films Thickness | Temperature |
|---|---|---|---|
| K1 | 870.1 | 929.7 | 790.3 |
| K2 | 929.9 | 912.6 | 914.3 |
| K3 | 936.9 | 894.6 | 1032.3 |
| k1 | 290 | 309.9 | 263.4 |
| k2 | 310 | 304.2 | 304.8 |
| k3 | 312.3 | 298.2 | 344.1 |
| R | 22.3 | 11.7 | 80.7 |
