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. 2017 Jan 31;7:9. doi: 10.1038/s41598-017-00053-7

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© The Author(s) 2017

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Error analysis of the translational offset and the vibration between the two cameras. (a) Modeling of the circular phase target with the diameter of 12 μm and the etching depth of 136 nm on a fused quartz substrate. (b) Simulation result of the relative phase retrieval error due to the translational offset between the two cameras. (c) Translational offsets in the x and y directions changing with time due to the environmental vibration in 20 seconds. (d) Histogram of the offset distance which is calculated from the translational offsets in the x and y directions in 20 seconds.