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. 2017 May 2;7:1367. doi: 10.1038/s41598-017-01545-2

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© The Author(s) 2017

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Schematic representation of a zone structure diagram for Al sputtered at constant pressure and power but different substrate temperatures showing the evolution of the grain structure with substrate temperature to melting temperature (T _S/T _M) ratios. In Zone I, the grains are porous and become larger as T _S/T _M increases. The transition zone (T) has densely packed and smaller grains and in Zone II the film crystallizes and have large columnar grains.