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. 2017 May 2;7:1367. doi: 10.1038/s41598-017-01545-2

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© The Author(s) 2017

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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(a) Mass sensitivity calibration by the deposition of known thicknesses of Al on the resonator surface area, S _m = (4.95 ± 0.08) kHz · cm²/ng. (b) Temperature effect on shear mode f _r, which decreases with temperature with a TCF value of −66 ppm/K. (c) Effect of ethanol-water mixtures with the shear mode f _r. (d) Detection of biotin conjugated Rabbit IgG in-liquid using the shear resonance of a functionalized device, detection is complete in 600 s. All the data are for the device with Al deposited at T _S = 100 °C.