Figure 1.

Synthesis of MoS₂ film. (a) Schematic illustration of the CVD system with a liquid precursor and water bubblers. The bubblers are connected with individual mass flow controllers. (b) Photographs of the bare SiO₂/Si substrate, as-grown MoS₂ film, and transferred MoS₂ film. (c) Atomic force microscopy image of the transferred MoS₂ film. The inset indicates the height profile along the dotted white line. The white arrows present the MoS₂ wrinkles. (d) SEM images of as-grown MoS₂ as a function of the growth time. The dark region indicates MoS₂, and the white background indicates the SiO₂/Si substrate. The coverage for monolayer (ML) and few-layer (FL) MoS₂ is displayed in each SEM image. (e) The coverage for monolayer (black) and few-layer (red) MoS₂ regions as a function of the growth time.