Figure 3.

In 3d5/2 core level binding energy vs. Fermi level position for In${}_2$O${}_3$ and ITO. The solid line marks a slope of one. Squares represent In${}_2$O${}_3$ films and sintered ceramic samples, solid circles represent sintered ceramic ITO, solid triangles represent 10% doped ITO films, open triangles represent 2% doped ITO films, cross circles represent air-annealed ITO films (at $400{}^{\circ }$C), and crossed squares represent ozone treated ITO films. Symbol size reflects the substrate temperature during deposition, which ranges from room temperature (small) to $400{}^{\circ }$C (large).