Figure 18.
Film stress versus pulse length modulation of the assisting ion beam for (a) TiO2 and (b) SiO2 films grown with an ion energy of 1.2 keV of the assist ion beam. PLM indicates the pulse length modulation of the assist ion beam [135].
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.