Table 3.

Film thickness distribution

	${\mathrm{f}}_{\mathrm{t}}20$	${\mathrm{f}}_{\mathrm{t}}30$	${\mathrm{f}}_{\mathrm{t}}60$
	${\mathrm{\mu }}_{\text{fitting}}=13.\stackrel{-}{3}\mathrm{\mu m}$ ${\mathrm{\sigma }}_{\text{fitting}}=5\mathrm{\mu m}$	${\mathrm{\mu }}_{\text{fitting}}=20\mathrm{\mu m}$ ${\mathrm{\sigma }}_{\text{fitting}}=7.5\mathrm{\mu m}$	${\mathrm{\mu }}_{\text{fitting}}=40\mathrm{\mu m}$ ${\mathrm{\sigma }}_{\text{fitting}}=15\mathrm{\mu m}$
Class	${\mathrm{f}}_{\mathrm{t}}^{\text{mean}}\left(\mathrm{i}\right)$ $\left(\mathrm{\mu m}\right)$	${\mathrm{f}}_{\mathrm{t}}^{\text{mean}}\left(\mathrm{i}\right)$ $\left(\mathrm{\mu m}\right)$	${\mathrm{f}}_{\mathrm{t}}^{\text{mean}}\left(\mathrm{i}\right)$ $\left(\mathrm{\mu m}\right)$	${\left.{\mathrm{n}}_{\mathrm{i}}/{\mathrm{n}}_{\mathrm{tot}}\right|}_{{\mathrm{f}}_{\mathrm{t}}^{\text{mean}}\left(\mathrm{i}\right)}$ $\left(\%\right)$
I	1.95	3.00	6.00	2.71
II	5.85	9.00	18.00	11.20
III	9.75	15.00	30.00	25.18
IV	13.65	21.00	42.00	30.82
V	17.55	27.00	54.00	20.57
VI	21.45	33.00	66.00	7.48
VII	25.35	39.00	78.00	1.48
VIII	29.25	45.00	90.00	0.16
IX	33.15	51.00	102.00	0.01
X	37.05	57.00	114.00	0