Table 2.

Results obtained for the different RIE powers studied in the BR-hPDMS samples.

	RIE Power
	10 W	20 W	30 W	40 W	50 W	60 W	70 W	80 W	90 W	100 W
Roughness (nm)	2.5	2.5	25.5	60	45	53	47.5	55	50	53.5
Linewidth (nm)	175	190	299	225	269	190	142	201	119	127
Depth (nm)	5.96	2.52	40	62	140	236	225	266	154	204
Selectivity SiOx/Si	0.42	0.18	2.85	4.42	10	16.85	16.07	19	11	16.57
Aspect Ratio	0.03	0.01	0.13	0.27	0.52	1.24	1.58	1.32	1.29	1.61