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Results obtained in 2D nanostructures for different RIE powers.
| RIE Power | |||||
|---|---|---|---|---|---|
| 60 W | 70 W | 80 W | 90 W | 100 W | |
| Diameter (nm) | 170 | 197 | 198 | 173 | 178 |
| Depth (nm) | 353 | 535 | 497 | 360 | 372 |
| Selectivity SiOx/Si | 25.2 | 38.2 | 35.5 | 25.7 | 26.5 |
| Aspect Ratio | 2.07 | 2.71 | 2.51 | 2.08 | 2.09 |
