Fig. 4. 2D-GIXD patterns of (a) 0F, (b) 1F, (c) 2F, (d) 3F, and (e) 4F films, GIXD patterns in (f) out-of-plane and (g) in-plane directions, (h) the pole figures, (i) the pole figures multiplied by a factor of sin ω, and (j) the Herman's orientation factors as a function of the number of fluorine substitutions. AFM topography images of films consisting of (k) 0F, (l) 1F, (m) 2F, (n) 3F, and (o) 4F.
