Fig. 5. Mechanism and example of templated dewetting: (a) schematic cross-sectional view of metal film dewetting on a patterned surface. J is the curvature-driven atomic flux on the surface; SEM micrograph of (b) a square-array of inverted pyramids in (100) silicon and (c) ordered arrays of one metal particle per pit (with no extraneous particles) formed by self-ordering dewetting of a 21 nm-thick Au film on an array of inverted pyramids with a 175 nm period. Fig. (b, c) are reprinted from ref. 24 with the permission of AIP Publishing.
