Figure A1.

Example of the ellipsometric characterization of Sample S5 in Table A3. Ellipsometry is a technique that measures the change in the polarization state of the light upon reflection on a surface. This change is expressed in terms of two angles, Ψ and Δ (shown in symbols in the graphs). The samples are measured at four different angles of incidence (AOI = 60°, 70°, 75° and 80°) and the optical parameters (thickness and refractive index) are estimated by means of a simultaneous least-squares fitting of the four measurements with a theoretical model. The best fit is indicated with the lines in the graphs. Adapted with permission from [38].